JPS6276530U - - Google Patents
Info
- Publication number
- JPS6276530U JPS6276530U JP16793685U JP16793685U JPS6276530U JP S6276530 U JPS6276530 U JP S6276530U JP 16793685 U JP16793685 U JP 16793685U JP 16793685 U JP16793685 U JP 16793685U JP S6276530 U JPS6276530 U JP S6276530U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transmitting plate
- light transmitting
- support stage
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16793685U JPS6276530U (en]) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16793685U JPS6276530U (en]) | 1985-10-31 | 1985-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276530U true JPS6276530U (en]) | 1987-05-16 |
Family
ID=31100338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16793685U Pending JPS6276530U (en]) | 1985-10-31 | 1985-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276530U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008105226A1 (ja) * | 2007-02-26 | 2008-09-04 | Dai Nippon Printing Co., Ltd. | 露光機のワークステージ、露光方法及び構造体の製造方法 |
| JP2012089641A (ja) * | 2010-10-19 | 2012-05-10 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
-
1985
- 1985-10-31 JP JP16793685U patent/JPS6276530U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008105226A1 (ja) * | 2007-02-26 | 2008-09-04 | Dai Nippon Printing Co., Ltd. | 露光機のワークステージ、露光方法及び構造体の製造方法 |
| GB2461653A (en) * | 2007-02-26 | 2010-01-13 | Dainippon Printing Co Ltd | Work stage for exposure device, exposure method, and method of manufacturing structure body |
| GB2461653B (en) * | 2007-02-26 | 2012-06-13 | Dainippon Printing Co Ltd | Work stage for exposing apparatus, exposing method and method of manufacturing a structure |
| JP5240185B2 (ja) * | 2007-02-26 | 2013-07-17 | 大日本印刷株式会社 | 露光機のワークステージ、露光方法及び構造体の製造方法 |
| US9158210B2 (en) | 2007-02-26 | 2015-10-13 | Dai Nippon Printing Co., Ltd. | Work stage of exposing apparatus, exposing method and method of manufacturing a structure |
| JP2012089641A (ja) * | 2010-10-19 | 2012-05-10 | Mitsubishi Electric Corp | 半導体装置の製造方法 |